ATMI and SAFC Hitech(r) Partnering to Co-Market ProE-Vap(r) Solid Source Vaporizer Technology to Semiconductor Markets

Companies Look to Make Advanced Solid Precursor Technology Available in New Markets and Extend the Supply Chain


SAN FRANCISCO, July 14, 2009 (GLOBE NEWSWIRE) -- At the SEMICON West industry trade show today, ATMI, Inc. (Nasdaq:ATMI), and SAFC Hitech(r), a business segment of SAFC(r) and member of the Sigma-Aldrich(r) Group (Nasdaq:SIAL), announced plans to co-market ATMI's ProE-Vap(r) system, a solid-source vaporizer designed for Atomic Layer Deposition (ALD). The innovative system currently is in demand for volume production of high-k/metal gate applications. The ensuing marketing partnership between the two companies will cover both the semiconductor and compound semiconductor markets. A definitive agreement is expected to be signed this summer.

"The ProE-Vap system removes a significant barrier to achieving successful ALD applications processes and overcoming manufacturing process challenges," said Tod Higinbotham, Executive Vice President, Process Solutions of ATMI. "In partnering with Sigma Aldrich, we will bring ProE-Vap technology benefits to a broader customer base and alleviate any single-source supply chain concerns."

ATMI developed the ProE-Vap system to address challenges in vaporizing solid materials for semiconductor ALD processes. Customers employing conventional solid vaporization techniques reported problems with film uniformity, particles, and process consistency. ATMI's exclusive tray technology in its ProE-Vap system provides more solid precursor surface area and greater heat uniformity to enhance vaporization and process stability. By delivering a higher flux of materials in this manner, the ProE-Vap system opens the door to the use of new classes of chemistries. Additionally, the system has the potential to produce greater uniformity from wafer to wafer and to extend ampoule lifetime, resulting in process efficiency gains and cost of ownership reductions.

According to the companies, the partnership will see SAFC Hitech and ATMI both offer ProE-Vap systems to the mainstream semiconductor sector. SAFC also will make ProE-Vap technology available to the global compound semiconductor market -- a segment which ATMI has not previously targeted, which could lead to new opportunities and uses for ProE-Vap technology.

SAFC Hitech is a premier provider of specialty gases and metal organics to the compound semiconductor market, including TMG, TMI, TEG, DEZ, and other advanced materials.

"ProE-Vap represents a proven, efficient way of delivering solid material in semiconductor applications," said Barry Leese, President of SAFC Hitech. "As a supplier of advanced materials in the compound semiconductor market, the ProE-Vap technology may better enable the delivery and efficient use of compound semiconductor solid metal organics, leading to better products and potential breakthroughs in the utilization of these materials in the LED marketplace."

The materials segment of the worldwide compound semiconductor market for is expected to grow to more than $1 billion by the end of 2010 from $800 million in 2007, according to research by the French analyst firm, Yole Developpement. Market expansion is being driven by strong demand within the LED, solid-state lighting, optoelectronics and solar segments.

Please visit http://www.atmi.com/semiconductor/case_study_ProE-Vap.htm for additional details on the ProE-Vap system.

About SAFC Hitech

SAFC Hitech provides a unique chemistry service translating application understanding into performance materials worldwide. Through collaborative partnerships and an integrated approach from research and development, process development and scale up to commercial manufacturing, SAFC Hitech invests in innovation and manufacturing enabling current and future technology needs. Further information can be found at http://www.safchitech.com.

About ATMI

ATMI, Inc. provides specialty semiconductor materials, and high-purity materials handling and delivery solutions designed to increase process efficiencies for the worldwide semiconductor, flat panel, and life sciences industries. For more information, please visit http://www.atmi.com.

The ATMI, Inc. logo is available at http://www.globenewswire.com/newsroom/prs/?pkgid=5254

Statements contained herein that relate to ATMI's future performance, including, without limitation, statements with respect to ATMI's anticipated results of operations or level of business for 2009 or any other future period, are forward-looking statements within the safe harbor provisions of the Private Securities Litigation Reform Act of 1995. Such statements are based on current expectations only and are subject to certain risks, uncertainties, and assumptions, including, but not limited to, changes in semiconductor industry growth (including, without limitation, wafer starts) or ATMI's markets; competition, problems, or delays developing, commercializing and delivering new products; problems or delays in integrating acquired operations and businesses; uncertainty in the credit and financial markets; and other factors described in ATMI's Form 10-K for the year ended December 31, 2008, and other subsequent filings with the Securities and Exchange Commission. Such risks and uncertainties may cause actual results to differ materially from those expressed in our forward-looking statements. ATMI undertakes no obligation to update any forward-looking statements.

ATMI, the ATMI logo and ProE-Vap are trademarks or registered trademarks of Advanced Technology Materials, Inc. in the U.S., other countries or both.



            

Contact Data